NSR Query Results
Output year order : Descending NSR database version of May 3, 2024. Search: Author = H.T.Tang Found 2 matches. 1996TA29 Nucl.Instrum.Methods Phys.Res. B108, 347 (1996) H.T.Tang, W.N.Lennard, L.C.Feldman, M.L.Green, D.Brasen 14N Depth Distribution Measurements for Ultrathin Dielectric Films on Silicon (100) NUCLEAR REACTIONS 12C, 14N, 16O, 28Si(d, p), E=1.1 MeV; measured proton spectra; 14N(d, α), E=1.1 MeV; measured α spectra; deduced nitrogen depth distribution in silicon oxynitride films.
doi: 10.1016/0168-583X(95)01059-9
1994LE19 Nucl.Instrum.Methods Phys.Res. B85, 42 (1994) W.N.Lennard, G.R.Massoumi, I.V.Mitchell, H.T.Tang, D.F.Mitchell, J.A.Bardwell Measurements of Thin Oxide Films of SiO2/Si(100) NUCLEAR REACTIONS 16O(d, p), E=825 keV; measured particle spectra, yield; deduced 16O areal density of ultra-thin SiO2 films.
doi: 10.1016/0168-583X(94)95782-7
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