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NSR database version of May 3, 2024.

Search: Author = M.L.Green

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1996TA29      Nucl.Instrum.Methods Phys.Res. B108, 347 (1996)

H.T.Tang, W.N.Lennard, L.C.Feldman, M.L.Green, D.Brasen

¹⁴N Depth Distribution Measurements for Ultrathin Dielectric Films on Silicon (100)

NUCLEAR REACTIONS ¹²C, ¹⁴N, ¹⁶O, ²⁸Si(d, p), E=1.1 MeV; measured proton spectra; ¹⁴N(d, α), E=1.1 MeV; measured α spectra; deduced nitrogen depth distribution in silicon oxynitride films.

doi: 10.1016/0168-583X(95)01059-9
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