NSR Query Results
Output year order : Descending NSR database version of May 10, 2024. Search: Author = M.Caymax Found 1 matches. 1994DE45 Nucl.Instrum.Methods Phys.Res. B85, 911 (1994) W.De Coster, B.Brijs, P.Osiceanu, J.Alay, M.Caymax, W.Vandervorst Ion Beam Mixing and Oxidation of a Si/Ge-Multilayer Under Oxygen Bombardment NUCLEAR REACTIONS Si(α, α), E=1 MeV; measured Rutherford back scattering α-spectra before, after oxygen bombardment, different Ge-content fractions removal; deduced features of processes during ion, substrate interaction.
doi: 10.1016/0168-583X(94)95949-8
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