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NSR database version of May 10, 2024.

Search: Author = M.C.Herberts

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1994FI07      Nucl.Instrum.Methods Phys.Res. B85, 579 (1994)

P.F.P.Fichtner, M.C.Herberts, P.L.Grande, M.Behar

Range Parameters of Er, Ga and F Implanted into SiC Films

NUCLEAR REACTIONS Er(α, α), E=760 keV; measured Rutherford backscattering spectrum, tilted geometry; deduced Er, Ga, F range parameters, implantation in SiC films. Other data included.

doi: 10.1016/0168-583X(94)95886-6
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