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1996SO20      Nucl.Instrum.Methods Phys.Res. B 113, 284 (1996)

R.Somatri, J.F.Chailan, A.Chevarier, N.Chevarier, G.Ferro, Y.Monteil, H.Vincent, J.Bouix

Alpha backscattering used in stoichiometry determination of thin SiC coatings on Si(100) wafers

NUCLEAR REACTIONS ¹²C(α, α), Si(α, α), E=3.8-4.6 MeV; measured products, ¹²C, Si; deduced σ(θ). Data were imported from EXFOR entry D0097.

doi: 10.1016/0168-583X(95)01416-0
Citations: PlumX Metrics
Data from this article have been entered in the EXFOR database. For more information, access X4 datasetD0097.