Boron detection using the nuclear reaction 11B(p, α)2α

https://doi.org/10.1016/0168-583X(96)00235-2Get rights and content

Abstract

The nuclear reaction 11B(p, α)2α has been used for the determination of boron impurities in silicon. α-particles with a continuous energy spectrum are produced by the three-body-dynamics of this reaction. Therefore, the differential cross section of this reaction has specifically been defined for materials analysis and measured at the three different laboratory angles θ = 108°, 138°, 158°, for incident proton energies between 150 keV and 800 keV. The formalism for concentration measurements has been developed for a thin boron layer and for a homogeneous boron distribution in the target. The concentration has been compared with results of charged particle activation analysis (CPAA) using the nuclear reaction 10B(d,n)11C.

References (12)

  • R.W. Michelmann et al.

    Nucl. Instr. and Meth. B

    (1990)
  • M. Vollmer et al.
  • N. Moncoffre

    Nucl. Instr. and Meth. B

    (1992)
  • F. Ajzenberg-Selove

    Nucl. Phys. A

    (1990)
  • M. Behar et al.

    Nucl. Instr. and Meth. B

    (1988)
  • G.G. Ohlsen

    Nucl. Instr. and Meth.

    (1965)
There are more references available in the full text version of this article.

Cited by (0)

View full text