Peculiarities of the 16O(α, α)16O 3.045 Me V resonance scattering and its application to investigation of oxygen in silicon

doi:10.1016/0168-583X(93)95848-Y

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Volume 83, Issue 3, November 1993, Pages 311-318

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Abstract

The elastic scattering of alpha particles by oxygen in the vicinity of the 3.045 MeV resonance was studied with the aim of its use in nuclear microanalysis. The ¹⁶O(α, α)¹⁶O resonance scattering was used to investigate the theoretically predicted effect of resonant laser-induced diffusion of impurities in crystals and to determine the lattice site location of oxygen in silicon using the channelling technique.

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We describe in detail a calibration method for the terminal voltage of small accelerators used for ion beam analysis, with the elastic resonance of ¹⁶O(α,α)¹⁶O at 3038 keV as the intrinsic measurement standard. The beam energy relative to this resonance is determined with a precision around 300 eV and an evaluated reproducibility of 1.0 keV. We show that this method is both robust and convenient, and demonstrate consistency with calibration relative to three other independent methods: using radioactive sources and using the resonant ²⁷Al(p,γ)²⁸Si and non-resonant ¹⁶O(p,γ)¹⁷F direct capture reactions. We re-evaluate the literature and show that the peak in the cross-section function is at 3038.1 ± 2.3 keV. By comparing the results obtained with ¹⁶O(α,α)¹⁶O to the other calibration methods we show that this uncertainty can be reduced to 1.3 keV.
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Citation Excerpt :
Calibration of the beam energy was not directly conducted, but we estimated the proton beam energy by checking the terminal voltage of the accelerator. The terminal voltage of the accelerator was checked by using 16O(α, α)16O resonant elastic scattering near 3.04 MeV [8,9], assuming the resonance at 3.037 MeV, which was obtained by the calculation with SigmaCalc software [10]. The terminal voltage that exhibited the resonant elastic scattering was 7 kV higher than that expected from the resonance energy of 3.037 MeV.
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The resonant elastic scattering $^{16}$ O(α,α) $^{16}$ O at near 3.045 MeV is applied to determine the oxygen concentration in oxide films. By means of the resonance yield, the oxygen concentration in TiO₂ films as well as the oxygen to metal stoichiometry as a function of the depth probed can be deduced. In this paper, TiO₂ films deposited by electron-beam (E-B) evaporation at different oxygen ambiences are analyzed using the method. Our experimental results demonstrate that the oxygen concentration in the films deposited by E-B evaporation is homogeneous, and oxygen pressure in the process of evaporation affects the oxygen concentration in the films drastically. Under our deposition conditions, we found that 1.6×10⁻⁴ Torr is the optimum value of oxygen pressure for forming TiO₂ films by the E-B evaporation method. At this oxygen pressure, we have prepared excellent bandpass filters.
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The analytical techniques using ion beams are powerful tools for surface analysis of solid materials. Constituent elements are important in determining the biocompatibility and corrosion resistance of a biomaterial implant. The focus of this article is on the application of ion beam analysis towards quantifying the composition of calcium phosphate based biomaterials. Thin films of calcium phosphate bioceramics were prepared on Si and Ti substrates using ion beam sputter deposition (IBSD) and ion beam assisted sputter deposition (IBASD) methods. Precise amounts of calcium, phosphorus, oxygen and hydrogen in these thin films are determined by combining four ion beam analysis techniques. The simultaneous application of proton induced X-ray emission (PIXE) and Rutherford backscattering spectrometry (RBS) were utilized to quantify composition and amounts of elements heavier than helium. Elastic recoil detection analysis (ERDA) was used to determine hydrogen content while resonance-enhanced RBS (RE-RBS) was utilized to measure oxygen concentration. The amount of assisting ion beam current density during deposition affected the concentration ratios of Ca, O and H to P. Combination of different ion beam analysis methods is useful in characterizing the elemental composition and distribution of composite biomaterials.
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The resonant elastic scattering ¹⁶O(α,α)¹⁶O at near 3.045 MeV is a very powerful tool for determining the oxygen concentration in oxide films. The resonance yield can be transformed into the stoichiometric ratio of oxygen to Ba–Ti as a function of the probed depth. By means of the resonance yield, we can obtain the oxygen concentration in BaTiO₃ films. In this work the method was used to analyze the oxygen concentration of the BaTiO₃ films deposited by pulsed laser deposition (PLD) at different oxygen ambience. Our experimental results demonstrate that the oxygen concentration in the films deposited by PLD is homogeneous, and the effect of oxygen pressure in the process of deposition on the oxygen concentration in the films is very significant. It is shown in our experiment that 20 Pa is the lowest value of oxygen pressure for forming optimum BaTiO₃ films by the PLD method.
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¹: Lebedev Physical Institute, Moscow, Russian Federation.

²: Institute of Semiconductors, Kiev, Ukraine.

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Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Abstract

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Cited by (10)

On the traceably accurate voltage calibration of electrostatic accelerators

Energy dependence of non-Rutherford proton elastic scattering spectrum for hafnium nitride thin film

Quantitative analysis of the oxygen content in TiO<inf>2</inf> films deposited by electron-beam evaporation using <sup>16</sup>O(α, α)<sup>16</sup>O resonant elastic scattering

Characterization of calcium phosphate bioceramic films using ion beam

Quantitative analysis of the oxygen content in BaTiO<inf>3</inf> films deposited by PLD using <sup>16</sup>O(α,α)<sup>16</sup>O resonant elastic scattering

Energy levels of light nuclei, A = 20